1. AMD Saxony Manufacturing Co., Dresden D-01109, Germany; 2. AMD technology R & D Group, Sunnyvale, California; 3. KLA-Tencor, Migdal HaEmek 23100, Israel) Overview: Because of the space imaging overlay (Ovcrlay) technology budget With the integrated circuit (IC) design specifications of austerity and IR2153S datasheet and tight, therefore, Overlay accuracy measuring the importance of technology increases. ...